Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /

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Bibliographic Details
Other Authors: Rossnagel, Stephen M, Westwood, William D. (William Dickson) 1937-, Cuomo, J. J.
Format: Book
Language:English
Published: Park Ridge Noyes Publications c1990.
Series:Materials science and process technology series
Subjects:
Plasma engineering
Plasma etching
Semiconductors > Etching
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