Microchip fabrication : a practical guide to semiconductor processing /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York
McGraw-Hill
c2004.
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| Edition: | Fifth edition. |
| Subjects: | |
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| Physical Description: | xiii, 642 pages: illustrations; 24cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0071432418 : |