Introduction to semiconductor manufacturing technology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Upper Saddle River
Prentice Hall
2001
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| Subjects: | |
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| Physical Description: | viii, 647 pages illustrations 24 cm. |
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| Bibliography: | Includes bibliographical references |
| ISBN: | 0130224049 |