Herring, R. B., Hunt, L. P., & O'mara, W. C. (1990). Handbook of semiconductor silicon technology. Noyes Publications.
Chicago Style (17th ed.) CitationHerring, Robert B., Lee P. Hunt, and William C. O'mara. Handbook of Semiconductor Silicon Technology. Park Ridge: Noyes Publications, 1990.
MLA (8th ed.) CitationHerring, Robert B., et al. Handbook of Semiconductor Silicon Technology. Noyes Publications, 1990.
Warning: These citations may not always be 100% accurate.