Handbook of semiconductor silicon technology /
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge
Noyes Publications
c1990.
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| Subjects: | |
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| Physical Description: | 795 pages illustrations 24 cm. |
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| Bibliography: | Includes bibliographical references |
| ISBN: | 0815512376: |