Microfabrication and nanomanufacturing /

Microfabrication and nanomanufacturing /

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Bibliographic Details
Other Authors: Jackson, Mark J.
Format: Book
Language:English
Published: Boca Raton, FL CRC Press/Taylor & Francis Group 2006.
Subjects:
Microelectronics.
Integrated circuits > Design and construction.
Microelectromechanical systems > Design and construction.
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Description
Physical Description:401 pages: illustrations; 26 cm.
ISBN:0824724313
9780824724313

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