Silicon wafer bonding technology for VLSI and MEMS applications /

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Bibliographic Details
Main Author:	Iyer, S.S (Author)
Other Authors:	Auberton-Herve, A. J.
Format:	Book
Language:	English
Published:	England INSPEC 2002
Subjects:	Integrated circuits > Very large scale integration. Microelectromechanical systems. Silicon-on-insulator technology.
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