Lyshevski, S. E. (2002). MEMS and NEMS: System, devices, and structures. CRC Press.
Cita Chicago (17th ed.)Lyshevski, Sergey Edward. MEMS and NEMS: System, Devices, and Structures. Boca Raton: CRC Press, 2002.
Cita MLA (8th ed.)Lyshevski, Sergey Edward. MEMS and NEMS: System, Devices, and Structures. CRC Press, 2002.
Atenció: Aquestes cites poden no estar 100% correctes.