Lyshevski, S. E. (2002). MEMS and NEMS: System, devices, and structures. CRC Press.
Chicagoスタイル(17版)引用形式Lyshevski, Sergey Edward. MEMS and NEMS: System, Devices, and Structures. Boca Raton: CRC Press, 2002.
MLA(8版)引用形式Lyshevski, Sergey Edward. MEMS and NEMS: System, Devices, and Structures. CRC Press, 2002.
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