MEMS and NEMS : system, devices, and structures /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton
CRC Press
c2002.
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| Series: | Nano- and microscience, engineering, technology, and medicine series.
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| Subjects: | |
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| Physical Description: | 461 pages: illustrations; 24 cm. |
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| ISBN: | 0849312620 9780849312625 |