MEMS and NEMS : system, devices, and structures /
Gardado en:
| Autor Principal: | |
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| Formato: | Libro |
| Idioma: | English |
| Publicado: |
Boca Raton
CRC Press
c2002.
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| Series: | Nano- and microscience, engineering, technology, and medicine series.
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| Subjects: | |
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