MEMS and NEMS : system, devices, and structures /

MEMS and NEMS : system, devices, and structures /

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Bibliografski detalji
Glavni autor:	Lyshevski, Sergey Edward (Autor)
Format:	Knjiga
Jezik:	English
Izdano:	Boca Raton CRC Press c2002.
Serija:	Nano- and microscience, engineering, technology, and medicine series.
Teme:	Microelectromechanical systems.
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