MEMS and NEMS : system, devices, and structures /

MEMS and NEMS : system, devices, and structures /

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書誌詳細
第一著者:	Lyshevski, Sergey Edward (著者)
フォーマット:	図書
言語:	English
出版事項:	Boca Raton CRC Press c2002.
シリーズ:	Nano- and microscience, engineering, technology, and medicine series.
主題:	Microelectromechanical systems.
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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