Microelectronic materials /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bristol
Institute of Physics Publishing
c1998.
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| Series: | Graduate student series in materials science and engineering.
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| Subjects: | |
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| Physical Description: | x, 544 pages: illustrations; 23 cm. |
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| ISBN: | 0852742703 |