Lyshevski, S. E. (2001). Nano-and microelectromechanical systems: Fundamentals of nano- and microengineering. CRC Press.
Dyfyniad Arddull ChicagoLyshevski, Sergey Edward. Nano-and Microelectromechanical Systems: Fundamentals of Nano- and Microengineering. Boca Raton: CRC Press, 2001.
Dyfyniad MLALyshevski, Sergey Edward. Nano-and Microelectromechanical Systems: Fundamentals of Nano- and Microengineering. CRC Press, 2001.
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