Nano-and microelectromechanical systems : fundamentals of nano- and microengineering /

Nano-and microelectromechanical systems : fundamentals of nano- and microengineering /

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Главный автор:	Lyshevski, Sergey Edward (Автор)
Формат:	‌
Язык:	English
Опубликовано:	Boca Raton CRC Press c2001.
Предметы:	Microelectromechanical systems.
Online-ссылка:	CRCnetBASE
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