Nano-and microelectromechanical systems : fundamentals of nano- and microengineering /

Nano-and microelectromechanical systems : fundamentals of nano- and microengineering /

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Détails bibliographiques
Auteur principal:	Lyshevski, Sergey Edward (Auteur)
Format:	Livre
Langue:	English
Publié:	Boca Raton CRC Press c2001.
Sujets:	Microelectromechanical systems.
Accès en ligne:	CRCnetBASE
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