Jaeger, R. C. (2002). Introduction to microelectronic fabrication (Second edition.). Prentice Hall.
Chicago Style (17th ed.) CitationJaeger, Richard C. Introduction to Microelectronic Fabrication. Second edition. Upper Saddle River: Prentice Hall, 2002.
MLA (8th ed.) CitationJaeger, Richard C. Introduction to Microelectronic Fabrication. Second edition. Prentice Hall, 2002.
Warning: These citations may not always be 100% accurate.