Introduction to microelectronic fabrication /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Upper Saddle River
Prentice Hall
c2002.
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| Edition: | Second edition.. |
| Series: | Modular series on solid state devices
v. 5 |
| Subjects: | |
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| Item Description: | Gift from Koperasi UniMAP Perlis |
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| Physical Description: | xiv, 316 pages. illustrations. 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0201444941 |