Introduction to microelectronic fabrication /
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Main Author: | Jaeger, Richard C. (Author) |
---|---|
Format: | Book |
Language: | English |
Published: |
Upper Saddle River
Prentice Hall
c2002.
|
Edition: | Second edition.. |
Series: | Modular series on solid state devices
v. 5 |
Subjects: | |
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