Materials science of thin films : deposition and structure /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
San Diego
Academic Press
c2002.
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| Edition: | 2nd ed. |
| Subjects: | |
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| Physical Description: | xxi, 794 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references |
| ISBN: | 0125249756 |