MEMS mechanical sensors /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston
Artech House
c2004.
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| Subjects: | |
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| Physical Description: | x, 269 pages : illustrations ; 26 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 1580535364 |