APA (7th ed.) Citation

Madou, M. J. (2002). Fundamentals of microfabrication: The science of miniaturization (2nd ed.). CRC Press.

Chicago Style (17th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. Boca Raton: CRC Press, 2002.

MLA (8th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. CRC Press, 2002.