Madou, M. J. (2002). Fundamentals of microfabrication: The science of miniaturization (2nd ed.). CRC Press.
Chicago Style (17th ed.) CitationMadou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. Boca Raton: CRC Press, 2002.
MLA (8th ed.) CitationMadou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. CRC Press, 2002.
Warning: These citations may not always be 100% accurate.