Fundamentals of microfabrication the science of miniaturization /

Fundamentals of microfabrication the science of miniaturization /

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Bibliographic Details
Main Author: Madou, Marc J. (Author)
Format: Book
Language:English
Published: Boca Raton CRC Press c2002.
Edition:2nd ed.
Subjects:
Microelectronics.
Integrated circuits > Design and construction.
Microelectromechanical systems > Design and construction.
Machining.
Microelectronic packaging.
Lasers > Industrial applications.
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Description
Physical Description:723 pages: illustration (some colour); 29 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0849308267
9780849308260

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