Fundamentals of microfabrication the science of miniaturization /

Fundamentals of microfabrication the science of miniaturization /

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Bibliographic Details
Main Author:	Madou, Marc J. (Author)
Format:	Book
Language:	English
Published:	Boca Raton CRC Press c2002.
Edition:	2nd ed.
Subjects:	Microelectronics. Integrated circuits > Design and construction. Microelectromechanical systems > Design and construction. Machining. Microelectronic packaging. Lasers > Industrial applications.
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