Kern, W. (1993). Handbook of semiconductor wafer cleaning technology: Science, technology, and applications. Noyes Publications.
Chicago Style (17th ed.) CitationKern, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Park Ridge: Noyes Publications, 1993.
MLA (8th ed.) CitationKern, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Noyes Publications, 1993.
Warning: These citations may not always be 100% accurate.