APA (7th ed.) Citation

Kern, W. (1993). Handbook of semiconductor wafer cleaning technology: Science, technology, and applications. Noyes Publications.

Chicago Style (17th ed.) Citation

Kern, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Park Ridge: Noyes Publications, 1993.

MLA (8th ed.) Citation

Kern, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. Noyes Publications, 1993.

Warning: These citations may not always be 100% accurate.