Handbook of semiconductor wafer cleaning technology : science, technology, and applications /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge
Noyes Publications
c1993.
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| Series: | Materials science and process technology series. Electronic materials and process technology
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| Subjects: | |
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| Physical Description: | xx, 623 pages: illustration; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815513313 |