Micro process engineering : fundamentals, devices, fabrication, and applications /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Weinheim
Wiley-VCH
c2006.
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| Series: | Advanced micro & nanosystems
v. 5. |
| Subjects: | |
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| Physical Description: | xxii, 507 pages: illustrations; 25 cm. |
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| ISBN: | 3527312463 (hc) 9783527312463 |