APA (7th ed.) Citation

May, G. S., & Spanos, C. J. (2006). Fundamentals of semiconductor manufacturing and process control. Wiley-Interscience.

Chicago Style (17th ed.) Citation

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Hoboken, N.J: Wiley-Interscience, 2006.

MLA (8th ed.) Citation

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Wiley-Interscience, 2006.