Fundamentals of semiconductor manufacturing and process control /

Fundamentals of semiconductor manufacturing and process control /

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Bibliographic Details
Main Author: May, Gary S (Author)
Other Authors: Spanos, Costas J.
Format: Book
Language:English
Published: Hoboken, N.J. Wiley-Interscience c2006.
Subjects:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Process control > Statistical methods.
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Description
Physical Description:xix, 463 pages: illustrations; 24 cm.
ISBN:0471784060 (hc)
9780471784067

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