Fundamentals of semiconductor manufacturing and process control /

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Bibliographic Details
Main Author:	May, Gary S (Author)
Other Authors:	Spanos, Costas J.
Format:	Book
Language:	English
Published:	Hoboken, N.J. Wiley-Interscience c2006.
Subjects:	Semiconductors > Design and construction. Integrated circuits > Design and construction. Process control > Statistical methods.
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