Proceedings of the 10th International Autumn Meeting Gettering and defect engineering in semiconductor technology : GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003 - Richter, H., 1940-; Kittler, M. (Martin) (Diffusion and defect data. Solid state phenomena, 2004)