Surfaces, interfaces, and thin films for microelectronics /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Hoboken, N.J.
Wiley-Interscience
2008.
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| Subjects: | |
| Online Access: | Click here to view the full text content |
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| Physical Description: | xiii, 515 pages: illustrations; 24 cm. |
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| ISBN: | 0470174471 9780470174470 |