APA (7th ed.) Citation

Misra, A., Hogan, J. D., & Chorush, R. Handbook of chemicals and gases for the semiconductor industry.

Chicago Style (17th ed.) Citation

Misra, Asutosh, Jeremiah D. Hogan, and Russell Chorush. Handbook of Chemicals and Gases for the Semiconductor Industry.

MLA (8th ed.) Citation

Misra, Asutosh, et al. Handbook of Chemicals and Gases for the Semiconductor Industry.

Warning: These citations may not always be 100% accurate.