Design and fabricate "wineglass" contact formation by simultaneous wet-dry etch process.
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| Format: | Book |
| Language: | English |
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| LEADER | 01054nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | vtls000031454 | ||
| 003 | MY-KaKUK | ||
| 005 | 20210816100100.0 | ||
| 008 | 120305 000 0 eng d | ||
| 035 | |a (OCoLC)ocn762063835 | ||
| 039 | 9 | |a 201203051650 |b SMT |c 201111291152 |d VLOAD |c 201111291132 |d VLOAD |c 201111161312 |d VLOAD |y 200706141204 |z NAK | |
| 090 | |a TK7874 |b M7N839 2006 |c f |d rb | ||
| 100 | 1 | |a Mohd Norhafiz Bin. Hashim |e author | |
| 245 | 1 | 0 | |a Design and fabricate "wineglass" contact formation by simultaneous wet-dry etch process. |
| 264 | 0 | |a Kangar |b Kolej Universiti Kejuruteraan Utara Malaysia |c 2006 | |
| 300 | |a xiii, 88pages |b illustrations |c 30cm | ||
| 500 | |a Laporan Projek Tahun Akhir Sidang Akademik 2005/2006 PPK Mikroelektonik | ||
| 650 | 0 | |a Semiconductors |x Etching | |
| 949 | |a VIRTUAITEM |d 30000 |f 1 |x 1 |6 026027 |a TK7874 M7N839 2006 f rb | ||
| 942 | |2 lcc |c BK-OS | ||
| 999 | |c 91376 |d 91376 | ||
| 952 | |0 0 |1 0 |2 lcc |4 0 |6 TK7874 M7 N839 02006 F RB |7 0 |9 88604 |a PTSFP |b PTSFP |c 1 |d 2021-08-16 |l 0 |o TK7874 M7N839 2006 f rb |p 026027 |r 2021-08-16 |t 1 |w 2021-08-16 |y BK-OS | ||