N. Helbert, J. Handbook of VLSI microlithography: Principles, tools, technology, and applications.
Cita Chicago (17th ed.)N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.
Cita MLA (8th ed.)N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.
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