N. Helbert, J. Handbook of VLSI microlithography: Principles, tools, technology, and applications.
Dyfyniad Arddull ChicagoN. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.
Dyfyniad MLAN. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.