Cita APA (7a ed.)

N. Helbert, J. Handbook of VLSI microlithography: Principles, tools, technology, and applications.

Cita Chicago Style (17a ed.)

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.

Cita MLA (8a ed.)

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.