Cita APA

N. Helbert, J. Handbook of VLSI microlithography: Principles, tools, technology, and applications.

Citación estilo Chicago

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.

Cita MLA

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.

Warning: These citations may not always be 100% accurate.