APA ציטוט

N. Helbert, J. Handbook of VLSI microlithography: Principles, tools, technology, and applications.

Chicago Style (17th ed.) Citation

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.

ציטוט MLA

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.