APA(7版)引用形式

N. Helbert, J. Handbook of VLSI microlithography: Principles, tools, technology, and applications.

Chicagoスタイル(17版)引用形式

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.

MLA(8版)引用形式

N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.

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