N. Helbert, J. Handbook of VLSI microlithography: Principles, tools, technology, and applications.
芝加哥风格引文N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.
MLA引文N. Helbert, John. Handbook of VLSI Microlithography: Principles, Tools, Technology, and Applications.
警告：这些引文格式不一定是100％准确.