Nur Syuhada Md. Desa. Study of aspect ratio performance on silicon oxide etching using profiler meter, AFM and SEM.
Chicago (17e ed.) BronvermeldingNur Syuhada Md. Desa. Study of Aspect Ratio Performance on Silicon Oxide Etching Using Profiler Meter, AFM and SEM.
MLA (8e ed.) BronvermeldingNur Syuhada Md. Desa. Study of Aspect Ratio Performance on Silicon Oxide Etching Using Profiler Meter, AFM and SEM.
Let op: Deze citaties zijn niet altijd 100% accuraat.