Study of aspect ratio performance on silicon oxide etching using profiler meter, AFM and SEM

Study of aspect ratio performance on silicon oxide etching using profiler meter, AFM and SEM

The scope of this final year project is to get a high aspect ratio for etch profile using wet etching technique. After etching process using Buffered Oxide Etch (BOE), the structure profile had to viewed under profiler meter, Atomic Forces Microscopy (AFM) Scanning Electron Microscope (SEM).

Saved in:

Bibliografiske detaljer
Hovedforfatter:	Nur Syuhada Md. Desa (Author)
Format:	Electronisk Software Database
Sprog:	English
Fag:	Microelectronics.
Tags:	Tilføj Tag Ingen Tags, Vær først til at tagge denne postø!

Lignende værker

Reactive ion etching (RIE) etched wet-silica-on-silicon analysis for fluidwettability
af: Noor Aini Hamimah Abd. Rahim

Study of the effect of different gases parameter in dry etching process on etch rate profile
af: Zaharah Mohamad

MIMOS Semiconductor (M) Sdn. Bhd. (MySem)
af: Mohammad Hifzan Saibudin

Study of the thickness of the silicon dioxide on wafer using dry and wet oxidation method
af: Mohamad Fadzli Ali

Nanostructure formation using sem based e-beam lithography (EBL) technique : buffered oxide etch (BOE) profile
af: Nur Nazihah Halemi

Comparison of etching optimization process by taguchi method using minitab and design expert software
af: Azleen Abu Talib

Design and implementation of 3 axis magnetic field meter
af: Chin, Paik Leang

Design and implementation of 3 axis magnetic field meter
af: Chong, Wei Keat

Thin polycrystalline silicon process development
af: Muniyati Pakhuruddin

Ultrasonic range meter using PIC19F876
af: Muhammad Shukran Ghanim

Design and simulation of silicon-based magnetic sensor/
af: Nor Azlan Mohamed
Udgivet: (2011)

Effect of different dielectric materials for ultrathin oxide
af: Zarimawaty Zailan

Optimization on oxidation process using 2K factorial design method
af: Yeap, Li Chain

Gate oxide interrity (GOI) characterization for deep submicron CMOS device
af: Norain Bt Mohd Saad

Study on diffusivity of gallium dopant in silicon using spin on dopant (SOD) technique
af: Mohd Rosydi Zakaria

Investigation and modelling of boron diffusion reduction in silicon by fluorine implantation using numerical simulation
af: Chuah, Soo Kiet

16-bits high speed carry select adder
af: Nur Syuhada Muhammad Khariri

BST sensor application : digital thermometer
af: Nor Aniza Mat Desa

Theoretical study, simulation & fabrication on dry oxidation in terms of Si02 layer thinckness, resistivity & surface roughness
af: Mohd Adam Alias

The study on the effect of varing dopant concentration and diffusion time in the design of silicon avalanche diode with minimum VBR of 120+-20%
af: Yip, Siew Ling

Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide
af: Hafizal Hafiz Sarjoni

A study on surface roughness and morphology of Gallium Oxide Doped Ba0.5 Sr0.5 Ti03 thin film
af: Fadrul Hisham Mohd Fauzi

CMOS Inverter-Circuit Characterization and Performance Estimation/
af: Chew, Chee Ting
Udgivet: (2013)

Serial peripheral interface (SPI) (front end design)
af: Mohd Noorkasyfi Md Shariff

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)
af: Mohamad Shahrizal Md Ilias

Materials aspects in microsystem technologies /
Udgivet: (1999)

Improvement of SiGe HBT design and technology performance using device simulation
af: Nurradila Rahman

BTST thin film sensor application : heat indicator
af: Nur Faizah Jaafar

Analysis of deposited carbon based on electron beam induced deposition in scanning electron microscopy using secondary ion mass spectrometry
af: Nur Liana Kamal

Effect of diffusion coefficient and junction depth on variation of temperature and energy
af: Nur Ruzana Bohari

Simulation on effect of different types of channel/ drain engineering structure on MOS device performance
af: Norazlina Mohd Amin

A green house study of a capacitive soil moisture sensor for loamy clay soil
af: Nur Umirah Binti Johari
Udgivet: (2015)

Motor controller for anti stress chair
af: Nur Munirah Binti Othman
Udgivet: (2015)

Future trends in microelectronics : frontiers and innovations /
Udgivet: (2013)

Microelectronics /
af: Razavi, Behzad
Udgivet: (2015)

Development of capacitive instrument based on PIC16F876 microcontroller, RF-TX-315 and RF-RX-315 radio frequency modules for measuring loamy clay soil moisture content
af: Siti Nur Atiqah Binti Saharuddin
Udgivet: (2015)

RFID based patient history database
af: Nur Shareen Binti Noor Arzaman
Udgivet: (2015)

Sirim Berhad.
af: Norhariati MD. Juni

Kobe Precision Technology Sdn. Bhd
af: Khairun Nisak MD Ahir

Advanced Materials Research Centre (AMREC) Sirim Berhad.
af: Nur Nazihah Halemi