Optimization of nitride deposition process using Taguchi method

Optimization of nitride deposition process using Taguchi method

This final year project is mainly focused on obtaining the most optimize parameters of PECVD Si3N4 deposition process by using DOE. The Taguchi method of DOE will be used in performing optimization of the deposition process. Raw data for the deposition process is provided by the deposition module fr...

Πλήρης περιγραφή

Αποθηκεύτηκε σε:

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας:	Low, Zen Shiang (Συγγραφέας)
Μορφή:	Ηλεκτρονική πηγή Λογισμικό Βάση Δεδομένων
Γλώσσα:	English
Θέματα:	Microelectronics.
Ετικέτες:	Προσθήκη ετικέτας Δεν υπάρχουν, Καταχωρήστε ετικέτα πρώτοι!

Παρόμοια τεκμήρια

Comparison of etching optimization process by taguchi method using minitab and design expert software
ανά: Azleen Abu Talib

Analysis of MEMS accelerometer sensor by using taguchi optimization method /
ανά: Nurul Izati Md. Johan
Έκδοση: (2015)

Analysis of MEMS accelerometer sensor by using taguchi optimization method /
ανά: Nurul Izati Md. Johan
Έκδοση: (2015)

Optimization on oxidation process using 2K factorial design method
ανά: Yeap, Li Chain

Analysis of deposited carbon based on electron beam induced deposition in scanning electron microscopy using secondary ion mass spectrometry
ανά: Nur Liana Kamal

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)
ανά: Mohamad Shahrizal Md Ilias

The influence on the accelerating voltages on the growth of the square structure during electron beam induced deposition (EBID) method
ανά: Muhammad Afiq Abdul Aziz

Analysis of square shaped microstructure based electron bean induced deposition
ανά: Siti Fatimah Abdul Rahman

Electrical characterization of 0.15um CMOS transistor using tsuprem-4 and medici
ανά: Low, Pooi Lam

Optimization of glucose production from rice husk by using cellulase enzyme /
ανά: Nurhidayah Kamaruddin
Έκδοση: (2013)

Simulation of ion implantation using Monte Carlo method for investigation on ion trajectories
ανά: Zainab Ramli

Study of the thickness of the silicon dioxide on wafer using dry and wet oxidation method
ανά: Mohamad Fadzli Ali

Intrusion detectionsystem
ανά: Low Kar Xin
Έκδοση: (2015)

Polysilicon process development - the effect of pecvd process parameters on the film characteristics
ανά: Mujahidun Mashuri

Method of measurement of LTCC metallization thickness
ανά: Lee, Soo Khiang

Thin polycrystalline silicon process development
ανά: Muniyati Pakhuruddin

Comparison of Delays Between 4-Bits Ripple-Carry Adder And 4-Bits Carry Look-Ahead Adder Using Logical Effort Method/
ανά: Siti Nurhanani Che Yahya
Έκδοση: (2011)

Semiconductor optical amplifier (SOA) for photonic signal processing/
ανά: Latty Shazana Ismail
Έκδοση: (2011)

Area array packaging processes : for BGA, flip chip and CSP /
Έκδοση: (2004)

Area array packaging processes : for BGA, Flip Chip, and CSP /

Fabrication of 50 ¡Łm transistor and AINiAu interconnection process
ανά: Shaffie Husin

Design and Analysis of a Digital Signal Processing for Biomedical Application System/
ανά: Ch'ng, Ei Peng
Έκδοση: (2011)

Automated classroom reservation using SMS
ανά: Nurul Nadiah Binti Mohamed Hatta
Έκδοση: (2015)

The effect of process parameters on metal step coverage for aluminum (AI) by evaporation technique
ανά: Noraishah Azman

Student attendance management system using RFID
ανά: Nurul A'qilah Bt. Hasmizi
Έκδοση: (2015)

The Design of an Encryption Chip Using Vigenere Cipher/
ανά: Tan, Shih Peng
Έκδοση: (2011)

Portable phone directory using altera devices/
ανά: Vincent, Tiong Kwong
Έκδοση: (2011)

Portable phone directory using altera devices/
ανά: Mohammad Isa Ahmad Azan
Έκδοση: (2011)

Simulation of 0.35 Um NMOS process based on UniMAP Cleanroom facilities
ανά: Izny Atikah Ahmad Fahmi

Study of the effect of different gases parameter in dry etching process on etch rate profile
ανά: Zaharah Mohamad

Smart arm robot using visual basic program
ανά: Wee, Joo Ann

Design and implementation of a music box using FPGA
ανά: Tan, Kian Yiak

Portable Food Menu Directory Using Altera Devices/
ανά: Chi, Choong Tian
Έκδοση: (2011)

Design and implementation of a VGA display generator using FPGA
ανά: Haslinda Hassan

Design a current mirror using body driven technique
ανά: Siti Zawana Abdul Rani

RC car control using accelerometer sensor (RCC-A)
ανά: Alif Aizat Azraie Bin Ahmad Jaelan
Έκδοση: (2015)

Ultrasonic range meter using PIC19F876
ανά: Muhammad Shukran Ghanim

Fan control and monitoring system using visual basic program /
ανά: Khairul Hisyam Hasan
Έκδοση: (2008)

Development door locking system via bluetooh using 8051
ανά: Nesamalar Rukkumaran
Έκδοση: (2015)

Design and simulation of CMOS operational amplifier using mentor graphics tool
ανά: Ramalu, Jegatheesan Sri