Optimization of nitride deposition process using Taguchi method

Optimization of nitride deposition process using Taguchi method

This final year project is mainly focused on obtaining the most optimize parameters of PECVD Si3N4 deposition process by using DOE. The Taguchi method of DOE will be used in performing optimization of the deposition process. Raw data for the deposition process is provided by the deposition module fr...

Cur síos iomlán

Sábháilte in:

Sonraí bibleagrafaíochta
Príomhchruthaitheoir:	Low, Zen Shiang (Údar)
Formáid:	Leictreonach Bogearraí Bunachar sonraí
Teanga:	English
Ábhair:	Microelectronics.
Clibeanna:	Cuir clib leis Níl clibeanna ann, Bí ar an gcéad duine le clib a chur leis an taifead seo!

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