Single cyrstal SiC capacitive pressure sensor

Single cyrstal SiC capacitive pressure sensor

This final year project is about to design a capacitive pressure sensor that can be operated in high temperature using the Single Crystal 3C-SiC as the diaphragm.

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Dettagli Bibliografici
Autore principale:	Ruhaizi Mohd Hatta (Autore)
Natura:	Elettronico Software Database
Lingua:	English
Soggetti:	Microelectronics.
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