Microfluidic poly-si electrodes capacitor (fabricate & testing)
The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.
Saved in:
Main Author: | |
---|---|
Format: | Electronic Software Database |
Language: | English |
Subjects: | |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole. |
---|---|
Item Description: | Final Year project |
Physical Description: | 1 CD-ROM 4 3/4 in. |