Microfluidic poly-si electrodes capacitor (fabricate & testing)

The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.

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Bibliographic Details
Main Author: Esmal Fhadly Abd Malek (Author)
Format: Electronic Software Database
Language:English
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Description
Summary:The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.
Item Description:Final Year project
Physical Description:1 CD-ROM 4 3/4 in.